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EzhouAnodizing of aluminum, magnesium, and titanium alloys

EzhouChemical Conversion Coatings on Aluminum, Magnesium, and Titanium Alloys

EzhouFunctional Electroplating and Chemical Plating

EzhouMicro-arc oxidation of aluminum, magnesium, and titanium alloys

EzhouFunctional anodic oxide film on aluminum alloy

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EzhouFunctional oxide film on the RPS chamber of the remote plasma source

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EzhouFunctional anodic oxide film on aluminum alloy

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Product Description

The functional oxide film for RPS chambers is a specialized coating designed for remote plasma source (RPS) chambers used in the semiconductor manufacturing industry. This film meets eight critical performance criteria—no microcracks, high strength, acid resistance, electrical insulation, and low outgassing—making it indispensable for ensuring reliable semiconductor fabrication.

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