Harbin Sanyong Metal Surface Technology Co., Ltd.

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Bao'anAnodizing of aluminum, magnesium, and titanium alloys

Bao'anChemical Conversion Coatings on Aluminum, Magnesium, and Titanium Alloys

Bao'anFunctional Electroplating and Chemical Plating

Bao'anMicro-arc oxidation of aluminum, magnesium, and titanium alloys

Bao'anFunctional anodic oxide film on aluminum alloy

Bao'anPattern Formation and Selective Processing

Bao'anBluing of high-alloy steels, passivation of stainless steels

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Bao'anFunctional oxide film on the RPS chamber of the remote plasma source

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Bao'anFunctional anodic oxide film on aluminum alloy

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Product Description

The functional oxide film for RPS chambers is a specialized coating designed for remote plasma source (RPS) chambers used in the semiconductor manufacturing industry. This film meets eight critical performance criteria—no microcracks, high strength, acid resistance, electrical insulation, and low outgassing—making it indispensable for ensuring reliable semiconductor fabrication.

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